Recent Advances in FIB-based Site-specific Atom Probe Specimen Preparation Techniques
نویسندگان
چکیده
منابع مشابه
Progress of Three-dimensional Atom Probe Techniques for Analysis of Steel Materials —Development of Atom Probe Specimen Preparation Techniques for Site-specific Regions—
Three-dimensional atom probe (3DAP) is a very powerful tool which can investigate atomic positions of all alloying elements in steel with lattice-spacing spatial resolution. However, the very small analysis volume of 3DAP has limited its application field. To meet the needs for atomic-scale analyses of steel materials, advanced preparation techniques of a needle specimen tip including a site-sp...
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Transmission electron microscopy (TEM) is a powerful tool for the investigation of the microstructure of materials, providing crystallographic information and composition at the nanometer scale. For such studies, samples should be transparent to the electron beam. In this review, TEM sample preparation techniques for different classes of materials, such as metals and alloys, multilayered coatin...
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Atom-probe tomography (APT) is a quantitative technique that permits three-dimensional (3-D) spectroscopic characterization of interfaces and other nanometer-scale features within a material. Specimens for atom-probe tomography (APT) analysis of semiconductor devices and nanostructured materials are typically fabricated employing a focused ion beam (FIB) instrument [1 3] or a dual-beam FIB inst...
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Atom-probe tomography (APT) provides atomic-scale spatial and compositional resolution that is ideally suited for the analysis of grain boundaries. The small sample volume analyzed in APT presents, however, a challenge for capturing mesoscale features, such as grain boundaries. A new site-specific method utilizing transmission electron microscopy (TEM) for the precise selection and isolation of...
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The recent development of Dual-BeamTM or Cross-BeamTM FIB systems has gradually taken over the traditional single beam FIB systems. A typical FIB column contains a liquid metal ion source that produces a finely focused Ga ion beam. The primary Ga ion beam is accelerated by 30-50 kV, and directed towards the features of interest on the specimen. The incident ion beam will sputter atoms from the ...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2007
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927607071437